2

Excimer Laser Based Lithography: A Deep-Ultraviolet Wafer Stepper For VLSI Processing

Year:
1987
Language:
english
File:
PDF, 14.30 MB
english, 1987
25

Comparisons of attenuated PSM technologies using etched quartz and embedded materials

Year:
1995
Language:
english
File:
PDF, 212 KB
english, 1995
27

Nanoscale Origami for 3D Optics

Year:
2011
Language:
english
File:
PDF, 1.42 MB
english, 2011